Relative fluorine concentrations in radio frequency/electron cyclotron resonance hybrid glow discharges
نویسندگان
چکیده
منابع مشابه
Simulation and analysis of electron cyclotron resonance discharges
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ژورنال
عنوان ژورنال: Applied Physics Letters
سال: 1992
ISSN: 0003-6951,1077-3118
DOI: 10.1063/1.107428